Micro Probe Station is suitable to analyze the 'Electrical & Optical' properties of the materials.
Its advantage is the in-situ measurement of the electrical and optical properties under the various environmental conditions;
Vacuum, Temperature, Gas flow, Humidity, Irradiation of light.
Peltier Stage -40 ℃ ~ 200 ℃
Resistor Heater Stage RT ~ 750 ℃
Cryo Stage -196 ℃ ~ RT
Number of Probe
Standard Model For
the analysis of most electrical properties
4 Ch Probes
6 Ch Probes
8 Ch Probes
+ Providing various probe distributions
according to the electrodes and applications
Unique Probing Method
Quick & Easy
A unique probe module is only 30x20x20 mm. A stable contact is possible even on a 20x20 ㎛ contact pad.
As the probe module has a very flexible motion, it smoothly follows the displacement of the contact point caused by thermal expansion and maintains a stable contact.
hyperfine Piezo-Driven Positioner
When stability and resolution are of the utmost importance, the Piezo-Driven positioner provides the perfect solution. Positioners are ultra-compact and based on slides with linear ball bearings. They are well-suited for micro-positioning systems, where space is the top priority.
Resolution: 50 nm
Force: 1 N( 100 g)
Travel(X, Y): ± 5.5 mm
Travel(Z): ± 2.25 mm
All probes have spring structure
inside and/or outside the probe module.
It never loses contact stability in gas flow and scanning experiments.
There is also a great advantage that the contact does not become unstable even if there is a movement due to thermal expansion and vibration.
The 20 &100 μm tip can be selected when the contact pad is small. For more precise probing, it is recommended to use optional Precise probing arm.
* The larger tip size, the better sample clamping force and durability.