70(w) x 140(l) x 31.5(h) mm

Low Weight :
650 ~ 950 gram

Small Volume :

Vacuum :
10-3 mbar (with rotary pump)
10-6 mbar (with Turbomolecular pump)
vacuum probe station, vacuum probe system, vacuum optical chamber
Micro Probe Station is suitable to analyze the 'Electrical & Optical'
properties of the materials.
Its advantage is the in-situ measurement of the electrical and optical
properties under the various environmental conditions; Vacuum,
Temperature, Gas flow, Humidity, Irradiation of light.
Temperature Ranges
hot stage, cold stage, peltier stage
  • Peltier Stage
    -40 ℃ ~ 200 ℃

  • Resistor Heater Stage
    RT ~ 750 ℃

  • Cryo Stage
    80 K ~ 373 K

Number of Probe
4 Point Probe, Van der Pauw, 3 Omerga measurement
Standard Model For the analysis of most electrical properties
  • 4 Ch Probes
  • 6 Ch Probes
  • 8 Ch Probes
  • .
  • .
  • .

+ Providing various probe distributions
according to the electrodes and applications

Unique Probing Method
Quick & Easy
A unique probe module is only 30x20x20 mm.
A stable contact is possible even on a 20x20 ㎛ contact pad.
As the probe module has a very flexible motion,
it smoothly follows the displacement of the contact point caused
by thermal expansion and maintains a stable contact.

see video at: https://youtu.be/Ikb9RtfGxFs
miniature positioner, micro positioner Manual Probe
Probing Arm
miniature positioner, micro positioner
piezo positioner, micro positioner

Piezo-Driven Positioner

When stability and resolution are of the utmost importance, the Piezo-Driven positioner provides the perfect solution. Positioners are ultra-compact and based on slides with linear ball bearings. They are well-suited for micro-positioning systems, where space is the top priority.
Resolution: 50 nm
Force: 1 N( 100 g)
Travel(X, Y): ± 5.5 mm
Travel(Z): ± 2.25 mm
Probe Tips
All probes have spring structure inside and/or outside the probe module. It never loses contact stability in gas flow and scanning experiments. There is also a great advantage that the contact does not become unstable even if there is a movement due to thermal expansion and vibration.

The 20 &100 μm tip can be selected when the contact pad is small.
For more precise probing, it is recommended to use optional Precise probing arm.
* The larger tip size, the better sample clamping force and durability.